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The ^AOxford Series in Electrical and Computer Engineering Ser.: The Science and Engineering of Microelectronic Fabrication by Stephen A. Campbell (2001, Hardcover, Revised edition)

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Ideal for upper-level undergraduate or first-year graduate courses and as a handy reference for professionals, The Science and Engineering of Microelectronic Fabrication, Second Edition, provides a thorough and accessible introduction to the field of microfabrication. Revised and expanded in this second edition, the text covers all the basic unit processes used to fabricate integrated circuits, including photolithography, plasma and reactive ion etching, ion implantation, diffusion, oxidation, evaporation, vapor phase epitaxial growth, sputtering, and chemical vapor deposition. Advanced processing topics such as rapid thermal processing, next generation lithography, molecular beam epitaxy, and metal organic chemical vapor deposition are also presented. The physics and chemistry of each process is introduced along with descriptions of the equipment used for the manufacture of integrated circuits. The text also discusses the integration of these processes into common technologies such as CMOS, double poly bipolar, and GaAs MESFETs. Complexity/performance tradeoffs are evaluated along with a description of current state-of-the-art devices. Each chapter includes sample problems with solutions. The text makes use of the popular process simulation package SUPREM to provide more meaningful examples of the type of real-world dopant redistribution problems that microelectronic fabrication engineers must face. This new edition includes a chapter on microelectromechanical structures (MEMS), an exciting new area in microfabrication. The coverage of MEMS includes fundamentals of mechanics; stress in thin films; mechanical to electrical transduction; mechanics of common MEMS devices; bulk micromachining etching techniques; bulk micromachining process flow; surface micromachining basics; surface micromachining process flow; MEMS actuators; and high aspect ratio microsystems technology (HARMST).

Product Identifiers

Publisher
Oxford University Press, Incorporated
ISBN-10
0195136055
ISBN-13
9780195136050
eBay Product ID (ePID)
57152

Product Key Features

Author
Stephen A. Campbell
Publication Name
Science and Engineering of Microelectronic Fabrication
Format
Hardcover
Language
English
Features
Revised
Publication Year
2001
Series
The ^Aoxford Series in Electrical and Computer Engineering Ser.
Type
Textbook
Number of Pages
624 Pages

Dimensions

Item Length
8.8in
Item Height
1.4in
Item Width
7.6in
Item Weight
42.3 Oz

Additional Product Features

Lc Classification Number
Tk7871.85.C25 2001
Edition Description
Revised Edition
Edition Number
2
Copyright Date
2001
Topic
Electronics / Semiconductors, Electronics / Microelectronics
Lccn
00-051022
Dewey Decimal
621.3815/2
Intended Audience
College Audience
Dewey Edition
21
Illustrated
Yes
Genre
Technology & Engineering

All listings for this product

item 1 The Science and Engineering of Microelectronics Fabrication Campbell 2001 2nd Ed
$14.99
item 2 The Science and Engineering of Microelectronic Fabrication
$26.95
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item 3 The Science and Engineering of Microelectronic Fabrication
$29.30
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item 4 The Science and Engineering of Microelectronic Fabrication - Second Edition
$35.00
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item 5 The Oxford Series in Electrical and Computer Engineering Ser.: The Science...
$42.00
item 6 THE SCIENCE AND ENGINEERING OF MICROELECTRONIC FABRICATION By Stephen A. Mint
$47.95
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item 7 The Science and Engineering of Microelectronic Fabrication by S.A. Campbell
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