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Advanced MEMS/NEMS Fabrication and Sensors by Zhuoqing Yang (2021, Hardcover)

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Author Zhuoqing Yang. Format Hardcover. Sports & Outdoors.

About this product

Product Identifiers

PublisherSpringer International Publishing A&G

ISBN-103030797481

ISBN-139783030797485

eBay Product ID (ePID)24050407813

Product Key Features

Book TitleAdvanced Mems/Nems Fabrication and Sensors

Number of PagesVI, 312 Pages

LanguageEnglish

TopicNanotechnology & Mems, Electronics / General, Cybernetics

Publication Year2021

IllustratorYes

GenreComputers, Technology & Engineering

AuthorZhuoqing Yang

FormatHardcover

Dimensions

Item Weight24.9 Oz

Item Length9.3 in

Item Width6.1 in

Additional Product Features

Number of Volumes1 vol.

Table Of ContentTip-based Nanofabrication for MEMS Devices.- 1D-Nanostructured Piezoresistive Microcantilever for Environmental Sensing.- Application of Non-template Special Nanostructure Fabrication Technology in Sensors.- Composite Micro-machining Technology on the Non-silicon MEMS.- Nano-in-Nano Integration for Nanofluidics.- Bionanoscaffolds-enabled Micro/Nanofabrication and Devices.- NEMS Sensors Based on Novel Nanomaterials.- Microfluidic Sensors in Surface Channel Technology.- MOEMS-enabled Miniaturized Biomedical Sensing and Imaging System.- Bio-inspired Flexible Sensors for Flow Field Detection.- Ultrasound MEMS for Biosensing and Biomedical Imaging.- Optofluidic Devices for Bio-analytical Applications.

SynopsisThis book begins by introducing new and unique fabrication, micromachining, and integration manufacturing methods for MEMS (Micro-Electro-Mechanical Systems) and NEMS (Nano-Electro-Mechanical Systems) devices, as well as novel nanomaterials for sensor fabrications. The second section focuses on novel sensors based on these emerging MEMS/NEMS fabrication methods, and their related applications in industrial, biomedical, and environmental monitoring fields, which makes up the sensing layer (or perception layer) in IoT architecture. This authoritative guide offers graduate students, postgraduates, researchers, and practicing engineers with state-of-the-art processes and cutting-edge technologies on MEMS /NEMS, micro- and nanomachining, and microsensors, addressing progress in the field and prospects for future development. Presents latest international research on MEMS/NEMS fabrication technologies and novel micro/nano sensors; Covers a broad spectrum of sensor applications; Written by leading experts in the field.

LC Classification NumberTK7875