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Thin Film Processes Hardcover John L. Vossen
Free US Delivery | ISBN:0127282505
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eBay item number:375306390037
Item specifics
- Condition
- Good
- Seller Notes
- “Used book that is in clean, average condition without any missing pages. 100% Money-Back Guarantee.”
- Book Title
- Thin Film Processes Hardcover John L. Vossen
- ISBN
- 9780127282503
- Publication Year
- 1979
- Type
- Textbook
- Format
- Hardcover
- Language
- English
- Publication Name
- Thin Film Processes
- Item Length
- 9.2in
- Publisher
- Elsevier Science & Technology Books
- Item Width
- 5.9in
- Number of Pages
- Xi, 564 Pages
About this product
Product Information
Remarkable advances have been made in recent years in the science and technology of thin film processes for deposition and etching. It is the purpose of this book to bring together tutorial reviews of selected filmdeposition and etching processes from a process viewpoint. Emphasis is placed on the practical use of the processes to provide working guidelines for their implementation, a guide to the literature, and an overview of each process.
Product Identifiers
Publisher
Elsevier Science & Technology Books
ISBN-10
0127282505
ISBN-13
9780127282503
eBay Product ID (ePID)
38744
Product Key Features
Publication Name
Thin Film Processes
Format
Hardcover
Language
English
Publication Year
1979
Type
Textbook
Number of Pages
Xi, 564 Pages
Dimensions
Item Length
9.2in
Item Width
5.9in
Additional Product Features
Table of Content
Introduction. J.L. Vossen, Physical Methods of Film Deposition. J.L. Vossen and J.J. Cuomo, Glow Discharge Sputter Deposition. J.A. Thornton and A.S. Penfold, Cylindrical Magnetron Sputtering. D.B. Fraser, The Sputter and S-Gun Magnetrons. R.K. Waits, Planar Magnetron Sputtering. J.M.E. Harper, Ion Beam Deposition. Chemical Methods of Film Deposition. F.A. Lowenheim, Deposition of Inorganic Films from Solution. W. Kern and V.S. Ban, Chemical Vapor Deposition of Inorganic Thin Films. Physical-Chemical Methods of Film Deposition J.R. Hollahan and R.S. Rosler, Plasma Deposition of Inorganic Thin Films. H. Yasuda, Glow Discharge Polymerization. Etching Processes. W. Kern and C.A. Deckert, Chemical Etching. C.M. Melliar-Smith and C.J. Mogab, Plasma-Assisted Etching Techniques for Pattern Delineation. References. Index.
Copyright Date
1978
Target Audience
Scholarly & Professional
Topic
Materials Science / General, Mechanical, Materials Science / Thin Films, Surfaces & Interfaces
Lccn
78-003348
Dewey Decimal
621.381/52
Dewey Edition
20
Illustrated
Yes
Genre
Technology & Engineering
Item description from the seller
Seller assumes all responsibility for this listing.
eBay item number:375306390037
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