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Handbook of Semiconductor Manufacturing Technology by Robert Doering (2000, Hardcover)
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It covers a wide range of topics including ion implantation, oxidation, rapid thermal processing, and more. The book includes a foreword by Jack S. Kilby, cowinner of the Nobel Prize in Physics 2000 "for his part in the invention of the integrated circuit.".
- Buy It NowHandbook of Semiconductor Manufacturing Technology Doering 2000 Hardback
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About this product
Product Identifiers
PublisherCRC Press LLC
ISBN-100824787838
ISBN-139780824787837
eBay Product ID (ePID)1859432
Product Key Features
Number of Pages1157 Pages
Publication NameHandbook of Semiconductor Manufacturing Technology
LanguageEnglish
SubjectIndustrial Engineering, Electronics / Semiconductors, Electronics / General
Publication Year2000
TypeTextbook
AuthorRobert Doering
Subject AreaTechnology & Engineering
FormatHardcover
Dimensions
Item Weight104.2 Oz
Item Length9.1 in
Item Width6.3 in
Additional Product Features
Intended AudienceScholarly & Professional
LCCN00-055564
Dewey Edition21
IllustratedYes
Dewey Decimal621.3815/2
Table Of ContentOverview of semiconductor devices; introduction to semiconductor equipment; silicon materials; surface preparation; ion implantation; dopant diffusion; oxidation; silicidation; rapid thermal processing; overview of interconnect; chemical vapour deposition; alternate interlevel dielectrics; polymide dielectrics; physical vapour deposition; chemical-mechanical polish; optical lithography; photoresist materials and processing; x-ray lithography; electron-beam lithography; photomask
SynopsisThe Handbook of Semiconductor Manufacturing Technology describes the individual processes and manufacturing control, support, and infrastructure technologies of silicon-based integrated-circuit manufacturing, many of which are also applicable for building devices on other semiconductor substrates. Discussing ion implantation, rapid thermal processing, photomask fabrication, chip testing, and plasma etching, the editors explore current and anticipated equipment, devices, materials, and practices of silicon-based manufacturing. The book includes a foreword by Jack S. Kilby, cowinner of the Nobel Prize in Physics 2000 "for his part in the invention of the integrated circuit.", The Handbook of Semiconductor Manufacturing Technology describes the individual processes and manufacturing control, support, and infrastructure technologies of silicon-based integrated-circuit manufacturing, many of which are also applicable for building devices on other semiconductor substrates. Discussing ion implantation, rapid thermal processing, photomask fabrication, chip testing, and plasma etching, the editors explore current and anticipated equipment, devices, materials, and practices of silicon-based manufacturing. The book includes a foreword by Jack S. Kilby, cowinner of the Nobel Prize in Physics 2000 "for his part in the invention of the integrated circuit. "
LC Classification NumberTK7871.85.H3335 2000
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