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Handbook of Physical Vapor Deposition (PVD) Processing,, Mattox 9780815520375.
US $495.65
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3 available / 1 sold
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eBay item number:333724584559
Item specifics
- Condition
- PublishedOn
- 2010-04-29
- ISBN
- 9780815520375
- EAN
- 9780815520375
- Publication Year
- 2010
- Type
- Textbook
- Format
- Hardcover
- Language
- English
- Publication Name
- Handbook of Physical Vapor Deposition (PVD) Processing
- Item Length
- 9.2in
- Publisher
- Elsevier Science & Technology Books
- Item Width
- 7.5in
- Number of Pages
- 792 Pages
About this product
Product Information
This updated version of the popular handbook further explains all aspects of physical vapor deposition (PVD) process technology from the characterizing and preparing the substrate material, through deposition processing and film characterization, to post-deposition processing. The emphasis of the new edition remains on the aspects of the process flow that are critical to economical deposition of films that can meet the required performance specifications, with additional information to support the original material. The book covers subjects seldom treated in the literature: substrate characterization, adhesion, cleaning and the processing. The book also covers the widely discussed subjects of vacuum technology and the fundamentals of individual deposition processes. However, the author uniquely relates these topics to the practical issues that arise in PVD processing, such as contamination control and film growth effects, which are also rarely discussed in the literature. In bringing these subjects together in one book, the reader can understand the interrelationship between various aspects of the film deposition processing and the resulting film properties. The author draws upon his long experience with developing PVD processes and troubleshooting the processes in the manufacturing environment, to provide useful hints for not only avoiding problems, but also for solving problems when they arise. He uses actual experiences, called "war stories", to emphasize certain points. Special formatting of the text allows a reader who is already knowledgeable in the subject to scan through a section and find discussions that are of particular interest. The author has tried to make the subject index as useful as possible so that the reader can rapidly go to sections of particular interest. Extensive references allow the reader to pursue subjects in greater detail if desired. The book is intended to be both an introduction for those who are new to the field and a valuable resource to those already in the field. The discussion of transferring technology between R&D and manufacturing provided in Appendix 1, will be of special interest to the manager or engineer responsible for moving a PVD product and process from R&D into production. Appendix 2 has an extensive listing of periodical publications and professional societies that relate to PVD processing. The extensive Glossary of Terms and Acronyms provided in Appendix 3 will be of particular use to students and to those not fully conversant with the terminology of PVD processing or with the English language. Fully revised and updated to include the latest developments in PVD process technology 'War stories' drawn from the author's extensive experience emphasize important points in development and manufacturing Appendices include listings of periodicals and professional societies, terms and acronyms, and material on transferring technology between R&D and manufacturing
Product Identifiers
Publisher
Elsevier Science & Technology Books
ISBN-10
0815520379
ISBN-13
9780815520375
eBay Product ID (ePID)
80533603
Product Key Features
Publication Name
Handbook of Physical Vapor Deposition (PVD) Processing
Format
Hardcover
Language
English
Publication Year
2010
Type
Textbook
Number of Pages
792 Pages
Dimensions
Item Length
9.2in
Item Width
7.5in
Additional Product Features
Lc Classification Number
Ts695
Edition Number
2
Reviews
"In addition to background theory and principles, this handbook is loaded with extensive practical information on vitually all aspects of PVD. It also has extensive listings of references, tabulated data, graphs, illustrations, and schematics - all of which greatly enhance the book and provide useful information. This handbook will be a frequented referenced book by those researchers using PVD."--Electrical Engineering, "In addition to background theory and principles, this handbook is loaded with extensive practical information on vitually all aspects of PVD. It also has extensive listings of references, tabulated data, graphs, illustrations, and schematics - all of which greatly enhance the book and provide useful information. This handbook will be a frequented referenced book by those researchers using PVD." --Electrical Engineering
Table of Content
Introduction; Substrate ("Real") Surfaces and Surface Modification; The "Good" Vacuum (Low Pressure) Processing Environment; The Sub-Atmospheric Processing Environments; The Low-Pressure Plasma Processing Environment; Vacuum Evaporation and Vacuum Deposition; Physical Sputtering and Sputter Deposition (Sputtering); Arc Vapor Deposition; Ion Plating and Ion Beam Assisted Deposition; Atomistic Film Growth and Some Growth-Related Film Properties; Film Characterization and Some Basic Film Properties; Adhesion and Deadhesion; Cleaning; External Processing Environment; Transfer of Technology from R&D to Manufacturing
Copyright Date
2010
Topic
General, Manufacturing
Dewey Decimal
671.735
Intended Audience
Scholarly & Professional
Dewey Edition
22
Illustrated
Yes
Genre
Technology & Engineering
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Value Added Tax Number:
- GB 724498118
Seller assumes all responsibility for this listing.
eBay item number:333724584559
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-***1 (417)- Feedback left by buyer.
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I will not be buying from this seller again. Ad description "very good". Seller did not package and ship hardcover book with the precautions as I expected. As a result, the book arrived damaged.
t***j (150)- Feedback left by buyer.
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Had to repurchase the book because the first one arrived badly damaged during transit. I contacted seller 3 times with no response but went ahead and recorder. Seller finally replied after I repurchased the second copy thanking me for my order. So had to buy this book twice and pay shipping twice. Second order arrived in good shape but packing still thin.
p***o (249)- Feedback left by buyer.
Past 6 months
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Received a different cover than pictured, but everything else was great. Condition is good for the cost.
Follow-up from: p***o- Feedback followed up by buyer.- Feedback followed up by buyer.
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