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Tantalum Oxide Thin Films for Embedded Capacitors by Pushkar Jain (Paperback, 2008)

About this product

About this product

Product Information

Embedded capacitor technology, where thin film capacitors are integrated at on-chip and/or off-chip levels, offers high packaging densities and improved electrical performance at potentially reduced costs of capacitor fabrication and integration. This research explores and establishes the leverages of using thin film embedded capacitors over currently used surface mount discrete capacitors. In particular, this work focuses on developing pulsed dc reactively sputtered tantalum oxide (Ta2O5) thin film capacitors for IC chips and packages. A design space for breakdown voltage and capacitance density of planar capacitors is established, with film thickness and material dielectric constant as parameters. The validity of the developed design space is experimentally verified with Ta2O5 thin films over a wide range of film thickness. An experimentally verified analytical model for pulsed dc reactive sputtering of Ta2O5 films is described and evaluated. Various processing and integration challenges in depositing thin films using reactive sputtering and their effects on electrical performance of thin-film capacitors are discussed.

Product Identifiers

Publisher
Vdm Verlag Dr. Müller E.K.
ISBN-13
9783639096620
eBay Product ID (ePID)
4049026241

Product Key Features

Subject Area
Bioengineering
Author
Pushkar Jain
Publication Name
Tantalum Oxide Thin Films for Embedded Capacitors
Format
Paperback
Language
English
Publication Year
2008
Type
Textbook
Number of Pages
212 Pages

Dimensions

Item Height
229mm
Item Width
152mm
Item Weight
290g

Additional Product Features

Title_Author
Pushkar Jain
Country/Region of Manufacture
Germany

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