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Spectroscopic Ellipsometry : Principles and Applications by Hiroyuki Fujiwara (2007, Hardcover)

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Ellipsometry is a powerful tool used for the characterization of thin films and multi-layer semiconductor structures. This book deals with fundamental principles and applications of spectroscopic ellipsometry (SE). Beginning with an overview of SE technologies the text moves on to focus on the data analysis of results obtained from SE, Fundamental data analyses, principles and physical backgrounds and the various materials used in different fields from LSI industry to biotechnology are described. The final chapter describes the latest developments of real-time monitoring and process control which have attracted significant attention in various scientific and industrial fields.

Product Identifiers

Publisher
Wiley & Sons, Incorporated, John
ISBN-10
0470016086
ISBN-13
9780470016084
eBay Product ID (ePID)
57021459

Product Key Features

Author
Hiroyuki Fujiwara
Publication Name
Spectroscopic Ellipsometry : Principles and Applications
Format
Hardcover
Language
English
Publication Year
2007
Type
Textbook
Number of Pages
392 Pages

Dimensions

Item Length
9.3in
Item Height
1in
Item Width
6.3in
Item Weight
27.1 Oz

Additional Product Features

Lc Classification Number
Qc443.F85 2007
Table of Content
Foreword. Preface. Acknowledgments. 1 Introduction to Spectroscopic Ellipsometry. 1.1 Features of Spectroscopic Ellipsometry. 1.2 Applications of Spectroscopic Ellipsometry. 1.3 Data Analysis. 1.4 History of Development. 1.5 Future Prospects. References. 2 Principles of Optics. 2.1 Propagation of Light. 2.2 Dielectrics. 2.3 Reflection and Transmission of Light. 2.4 Optical Interference. References. 3 Polarization of Light. 3.1 Representation of Polarized Light. 3.2 Optical Elements. 3.3 Jones Matrix. 3.4 Stokes Parameters. References. 4 Principles of Spectroscopic Ellipsometry. 4.1 Principles of Ellipsometry Measurement. 4.2 Ellipsometry Measurement. 4.3 Instrumentation for Ellipsometry. 4.4 Precision and Error of Measurement. References. 5 Data Analysis. 5.1 Interpretation of (Î¨, Î”). 5.2 Dielectric Function Models. 5.3 Effective Medium Approximation. 5.4 Optical Models. 5.5 Data Analysis Procedure. References. 6 Ellipsometry of Anisotropic Materials. 6.1 Reflection and Transmission of Light by Anisotropic Materials. 6.2 Fresnel Equations for Anisotropic Materials. 6.3 4Ã—4 Matrix Method. 6.4 Interpretation of (Î¨, Î”) for Anisotropic Materials. 6.5 Measurement and Data Analysis of Anisotropic Materials. References. 7 Data Analysis Examples. 7.1 Insulators. 7.2 Semiconductors. 7.3 Metals/Semiconductors. 7.4 Organic Materials/Biomaterials. 7.5 Anisotropic Materials. References. 8 Real-Time Monitoring by Spectroscopic Ellipsometry. 8.1 Data Analysis in Real-Time Monitoring. 8.2 Observation of Thin-Film Growth by Real-Time Monitoring. 8.3 Process Control by Real-Time Monitoring. References. Appendices. 1 Trigonometric Functions. 2 Definitions of Optical Constants. 3 Maxwell's Equations for Conductors. 4 Jones-Mueller Matrix Conversion. 5 Kramers-Kronig Relations. Index.
Copyright Date
2007
Topic
Materials Science / General, Spectroscopy & Spectrum Analysis
Lccn
2006-030741
Dewey Decimal
620.1/1295
Intended Audience
Trade
Dewey Edition
22
Illustrated
Yes
Genre
Technology & Engineering, Science

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Spectroscopic Ellipsometry : Principles and Applications by Hiroyuki Fujiwara (2007, Hardcover)

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item 1 Spectroscopic Ellipsometry : Principles and Applications, Hardcover by Fujiwa...

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