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Principles of Plasma Discharges and Materials Processing by Allan J. Lichtenberg and Michael A. Lieberman (1994, Hardcover)

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Product Information

Timely, authoritative, pedagogically consistent- a valuable professional resource and a superior didactic tool. Authored by two internationally respected pioneers in the field, this book offers a fully integrated, pedagogically consistent presentation of the fundamental physics and chemistry of partially ionized, chemically reactive, low-pressure plasmas and their roles in a wide range of plasma discharges and processes used in thin film processing applications-especially in the fabrication of integrated circuits. With many fully worked examples, practice exercises, and clear demonstrations of the relationship of plasma parameters to external control parameters and processing results, this book combines the best qualities of a student text and a professional resource.In-depth coverage of the fundamentals of plasma physics and chemistry-includes separate chapters on atomic and molecular collisionsApplies basic theory to plasma discharges, including calculations of plasma parameters and scaling of plasma parameters with control parametersApplies results to basic processing mechanisms and the effects of plasma parameters on those mechanismsUses numerous worked examples to demonstrate the relationships between control parameters, plasma parameters, and processing results

Product Identifiers

Publisher
Wiley & Sons, Incorporated, John
ISBN-10
0471005770
ISBN-13
9780471005773
eBay Product ID (ePID)
314827

Product Key Features

Author
Michael A. Lieberman, Allan J. Lichtenberg
Publication Name
Principles of Plasma Discharges and Materials Processing
Format
Hardcover
Language
English
Publication Year
1994
Type
Textbook
Number of Pages
600 Pages

Dimensions

Item Length
9.6in
Item Height
1.5in
Item Width
6.5in
Item Weight
31 Oz

Additional Product Features

Lc Classification Number
Qc718.5.D9l54 1994
Edition Number
1
Table of Content
Basic Plasma Equations and Equilibrium. Atomic Collisions. Plasma Dynamics. Diffusion and Transport. DC Sheaths. Chemical Reactions and Equilibrium. Molecular Collisions. Chemical Kinetics and Surface Processes. Particle and Energy Balance in Discharges. Capacitive Discharges. Inductive Discharges. Wave-Heated Discharges. DC Discharges. Etching. Deposition and Implantation. Appendices. References. Index.
Copyright Date
1994
Topic
Mechanics / Dynamics, Materials Science / Thin Films, Surfaces & Interfaces, Chemical & Biochemical, Physics / General
Lccn
94-028954
Dewey Decimal
530.44
Intended Audience
Scholarly & Professional
Dewey Edition
22
Illustrated
Yes
Genre
Technology & Engineering, Science

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item 1 PRINCIPLES OF PLASMA DISCHARGES AND MATERIALS PROCESSING By Michael A. Lieberman
$128.75
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item 2 Principles of Plasma Discharges and Materials Processing by Allan J. Lichtenberg
$350.00

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Principles of Plasma Discharges and Materials Processing by Allan J. Lichtenberg and Michael A. Lieberman (1994, Hardcover)

About this product

Product Information

Product Identifiers

Product Key Features

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Additional Product Features

All listings for this product

item 1 PRINCIPLES OF PLASMA DISCHARGES AND MATERIALS PROCESSING By Michael A. Lieberman

item 2 Principles of Plasma Discharges and Materials Processing by Allan J. Lichtenberg

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